SEM – FIB (DualBeam)
It integrates high-resolution SEM, Ga FIB, and low-vacuum imaging with Oxford EDS, cryo-stage, and CleanConnect cryogenic transfer, enabling imaging, analysis, site-specific milling, TEM sample preparation, and cryogenic workflows for conductive, non-conductive, frozen-hydrated, and air-sensitive specimens.
Best suited to work needing both large-area characterization and elemental mapping: batteries, catalysts, composites, microelectronics, and geomaterials.
| Column | NICol ultra-high-resolution non-immersion field-emission column |
| Source | Schottky field emitter |
| Objective lens | Dual objective — combined electromagnetic and electrostatic, field-free |
| Accelerating voltage | 200 V – 30 kV (landing energy 20 eV – 30 keV with beam deceleration) |
| Beam current | 1 pA – 400 nA |
| Resolution | 0.7 nm at 30 keV (STEM) · 1.0 nm at 30 keV (ETD) · 1.4 nm at 1 keV (T1) · 1.2 nm at 1 keV with beam deceleration |
| Detectors | Trinity system — T1/T2 in-lens, T3 in-column · ETD (SE) · ICE (SI/SE) · DBS retractable directional backscatter · STEM 3+ (BF/DF/HAADF) · GAD low-vacuum |
| Column | Sidewinder focused ion beam column |
| Ion source | Liquid gallium ion emitter (Ga LMIS) |
| Accelerating voltage | 500 V – 30 kV |
| Beam current | 1.5 pA – 65 nA |
| Resolution | 3.0 nm at 30 kV |
| Aperture strip | 15-position |
| Drift suppression | Standard, for non-conductive samples |
| Stage | 5-axis eucentric · X-Y 110 mm · Z 65 mm · 360° rotation · tilt −15° to +90° · XY repeatability 3 µm |
| Vacuum | Oil-free with integrated plasma cleaner |
| Low-vacuum mode | LoVac up to 50 Pa chamber pressure with H₂O vapour |
| Cryo | Cryo-stage and cryo-transfer available |
| Transfer | CleanConnect/QuickLoader cryo; EasyLift cryo lamella transfer |
| Automated prep | AutoTEM 5 for STEM/TEM specimens |
| Deposition | GIS — W, Pt |
| 3D workflows | Auto Slice & View 5 + Analytical Package; EDS/EBSD mapping for multimodal 3D datasets |
| Software | AutoScript DB (Academic), Python · MAPS 3 correlative · Avizo for EM Systems |
Complete the Helios training session with staff before independent use.
Science Education and Research Center (SERC)
Room 008
info.em@temple.edu
Publications using EM Lab data must acknowledge the facility.
See here.