Temple Nano Instrumentation Center

NIC – EM | Electron Microscopy Facility

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Thermo Fisher Helios 5 Laser Hydra

SEM – PFIB(Xe/Ar/N/O) – fs Laser (TriBeam)

It integrates high-resolution SEM, plasma FIB, and femtosecond laser ablation with Oxford EDS/EBSD, TOFWERK ToF-SIMS, and cryogenic capabilities for rapid 3D characterization, site-specific milling, TEM sample preparation, and multimodal imaging and analysis from the millimeter to nanometer scale.

This instrument was acquired through support from the U.S. National Science Foundation under MRI Grant No. 2511067.

Electron Column (SEM)

Column Elstar electron column with UC+ technology
Source Schottky field emitter
Objective lens Dual-mode magnetic immersion / field-free
Accelerating voltage 350 V – 30 kV (20 V – 30 kV with beam deceleration)
Beam current 0.8 pA – 100 nA
Resolution 0.6 nm at 2–15 keV · 0.7 nm at 1 keV · 1.0 nm at 500 eV · 1.1 nm at 300 eV
Detectors TLD (SE/BSE) · ICD (low-loss BSE) · ETD (SE)

Ion Column (Plasma FIB)

Ion species Xe, Ar, O2, N2 — selectable
Accelerating voltage 500 V – 30 kV
Beam current 1 pA – 2.5 µA in 14 steps at 30 kV
Resolution < 20 nm at 30 kV (Xe)

Femtosecond Laser

Integration In-chamber, coincident point shared with SEM and FIB
Wavelength 1030 nm (IR) · 515 nm (green)
Pulse duration < 300 fs
Repetition rate 1 kHz – 1 MHz

Analytical Detectors

EDS Oxford Ultim Max, 100 mm² SDD
EBSD Oxford Symmetry 3
SIMS ToF-SIMS C2 — elemental and isotopic 3D imaging

Stage & Vaccum

Stage 5-axis · X-Y 150 mm · tilt −38° to +53.8° · 360° rotation · 100 nm minimum step
Vacuum Oil-free with integrated plasma cleaner; cryo modules available

Sample Prep & Automation

Lamella transfer EasyLift nanomanipulator
Automated prep AutoTEM 5 for STEM/TEM specimens
Deposition GIS — W, Pt
3D workflows Auto Slice & View for automated serial-section datasets
Software AutoScript (Python) · MAPS correlative · Avizo

Not Trained Yet?

Complete the Helios training session with staff before independent use.